Ultrapure water with world-class specifications
"What they most expected of us was a stable supply of ultrapure water and stable operation," explains Y.H. (sales) in discussing what Rapidus asked of Organo. Ultrapure water plays a crucial role in semiconductor manufacturing, including for cleaning wafers. It is used to remove chemical solutions and contaminants and is the last liquid to come into contact with wafers during the cleaning process, so it must never become contaminated with impurities. "Any foreign material at all could cause operational defects, and the level of cleanliness required would be equivalent to keeping a baseball dome stadium completely clean of dust. Continuing to supply ultrapure water with the highest level of cleanliness for 24 hours a day without stopping is certainly not an easy task," stresses Y.H. The water quality required of the project was also far beyond what had been required for past projects. Rapidus required the highest possible specifications, going even beyond the 2 nm level. According to project sub-manager S.Y., "It wasn't enough to provide advanced service in a single area, such as removing impurities like particles, ions, metals, and organic matter. We needed to deliver world-class specifications in every area." It was during a period of trial and error that the team had a breakthrough in the form of Organo's R & D Center. According to project manager S.O., "We held many discussions with members of the development team who had been working relentlessly on the purification of ultrapure water, and developed a system to use the technologies we were researching in actual plants." His words show both the difficulty of the project and the strong determination of the team to overcome it.

A "water treatment service agreement" (Facility-owned Service) to support the stable supply of water
In addition to the highest possible water quality, the team needed to ensure a stable supply of ultrapure water. Organo made use of a water treatment service agreement (Facility-owned Service) in order to manage the quality of water and ensure a stable supply. Y.H. explains how this works. "Under a water treatment service agreement, Organo owns the equipment and is responsible for the operation and management of the equipment, its maintenance, and responding to unexpected problems. Our job doesn't end once the equipment has been delivered, and it's our mission to provide the customer with peace of mind through a system that allows us to continue to monitor operations as water treatment professionals." This method differs significantly from the standard service model, in which the customer manages the equipment supplied by Organo, and Organo provides support through maintenance and remote monitoring. In addition to reducing the initial investment in equipment, this method allows use of the equipment at a flat annual fee. Another benefit for Rapidus is that this allows personnel to focus on the company's core business of manufacturing. Organo bears overall responsibility for supplying the water for this next-generation semiconductor manufacturing location in Japan.

Dedicated personnel on site are responsible for operation and management 24 hours a day, 365 days a year
It is not only the equipment that supports the stable supply of ultrapure water and the stable operation of the water treatment system. The key to ensuring a stable supply is an operation and management system in which dedicated personnel on site catch even the most minor variations every day. T.M., the head of Chitose Office, describes what the work entails. "We use a shift system in which personnel, mostly Organo employees, are responsible for operation and management 24 hours a day, 365 days a year. Personnel patrol the site twice a day to gather operation data and check for any abnormalities, such as sounds or water leakage. The monitors in the management office allow us to check the operational status of equipment, the flow rate and pressure of water, and whether there are any alarms. If anything out of the ordinary happens, we figure out why it happened and how to fix it." Organo has an online operation system that makes use of remote monitoring. So why is it necessary to have dedicated personnel on site? T.M. provides a clear answer. "It's because we need to be able to respond immediately. The water treatment system at IIM is extremely important, and we need to respond quickly to any abnormalities that occur. Any delay cannot be tolerated, even at night or on holidays. That's why we have people on site instead of using remote monitoring." T.M. explains that operation and management require "getting the fundamentals right, every time." Personnel are required to avoid becoming complacent, remain aware of early signs of trouble, and always report to and remain in communication with the customer. Maintaining dedicated personnel on site 24 hours a day and 365 days a year has allowed Organo to build trust over time and is the type of initiative that requires a human touch.











































